AFM/SNOM Cantilever Probe Serial Fabrication Process with Controlled Tip Nanoaperture
Tsigara A., Belier B., Maillard F., Falgayrettes P., Nativel E., Kribich R., Gall-Borrut P., Universite Paris Sud, FR
In this paper we present the microfabrication steps of sol gel and polymer (SU8) based cantilever probe systems using an alternative batch front face fabrication process. The probes are consisting of cantilevers with pyramidal nanoengineered [...]