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HomeAuthorsFranz J.

Authors: Franz J.

Parameter Extraction for Surface Micromachining Using Eelectrical Characterization of Sensors

Maute M., Kimmerle S., Franz J., Hauer J., Schubert D., Krauss H.-R., Kern D.P., Robert Bosch GmbH, DE
This paper presents a novel methodology for the extraction of process dependent geometrical parameters of surface micromachined sensors. This approach is based on the electrical measurement of static capacitance-voltage characteristics of the sensor element on [...]

Simulation of Nonideal Behaviour in Integrated Piezoresistive Silicon Pressure Sensors

Romes W., Muchow J., Finkbeiner S., Franz J., Schatz O., Trah H-P., Robert Bosch GmbH, DE
The signal formation in piezoresistive silicon pressure sensors has been studied for many years and is very well understood meanwhile. Nevertheless there are higher order effects of nonideal behaviour such as nonlinearities and hys-teresis effects [...]

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