Dong Y. – TechConnect Briefs

Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors

Kraft M., Dong Y., Southampton University, UK

Using higher order sigma-delta modulator topologies, similar to the ones used for electronic A/D converters, and applying them to micromachined capacitive sensors is a promising approach to increase the performance of these sesnors. The paper [...]

Simulation of Micromachined Inertial Sensors with Higher-Order Single Loop Sigma-Delta Modulators

Dong Y., Kraft M., University of Southampton, UK

Micromachined capacitive inertial sensors incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range and bandwidth, and also provide a direct digital output. Previous work mainly focused on using only the sensing [...]

Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment

Dong Y., Tay F.E.H., Wen Y., Yuan X., Chen W.T., National University of Singapore, SG

The eigenfrequency of a MEMS Tuning Fork Gyroscope (TFG) is calculated using a formula derived from Rayleigh method. From this formula, the objective function for the optimal design is established. Then two methods to solve [...]