Realization of Silicon Nano-structured layers on Glass substrates suitable for light emitting diodes
Darbari S., Shahmohammadi M., Mohajerzadeh S., Robertson M.D., Thin Film and Nanoelectronics Laboratories, IR
Si-nano-crystal (Si-nc) layers with luminescent behavior on glass substrate have been prepared using a time multiplexed plasma hydrogenation and reactive ion etching at temperatures below 450oC. Various techniques such as SEM, Photo-luminescent and TEM analyses [...]