Chung C.K. – TechConnect Briefs

Inverse RIE Lag of Silicon Deep Etching

Chung C.K., Chiang H.N., National Cheng Kung University, TW

This paper reports for the first time that the phenomena and reaction mechanism of inverse reactive ion etching (RIE) lag occurs in the silicon deep RIE process without feature coalescence. This phenomenon is related to [...]

Novel Monolithic Micro Droplet Generator

Chung C.K., Lin C.J., Chen C.C., Chuang S.W., Fang Y.J., Hong Y.Z., National Cheng Kung University, TW

A novel monolithic off-shooter droplet generator has been demonstrated. The design, fabrication, bubble formation and droplet injection are described here. It is different from the conventional droplet generators of top-shooter, side-shooter and back-shooter for injection. [...]