Chuang C-H – TechConnect Briefs

Modeling of Laser Assisted Direct Imprinting Process Based on Pulsed Laser Heating and Elastodynamic Theory

Lee Y-C, Chuang C-H, Wang D-B, Liu C-P, Hsiao F-B, National Cheng Kung University, TW

Laser Assisted Direct Imprinting (LADI) is an efficient and direct way for fabricating nanostructures. In short, a quartz mold with nano-features is first pressed against a sample. Upon radiating a short laser pulse on the [...]

Numerical Investigation of Phase-Changing Heat Transfer for Laser-Assisted Direct Nano Imprint Processing

Hsiao F-B, Wang D-B, Jen C-P, Lee Y-C, Chuang C-H, National Cheng Kung University, TW

Laser-Assisted Direct Imprinting (LADI), a novel and promising technique, has been proposed since 2002 to utilize an excimer laser to irradiate and heat the silicon surface through a highly-transparent quartz mold preloaded onto the silicon. [...]