Chu L-H. – TechConnect Briefs

Strength Prediction for MEMS Components Transferring Large Loads

Chu L-H., Chen Q., Carman G.P., University of California, Los Angeles, US

In this paper the authors present a new strength criteria combined with a finite element analysis to predict the strength of MEMS fabricated microridges. The single crystal silicon microridges can be manufactured by various processes [...]