Fabrication of Cu-encapsulated Carbon Nanotube Inductors
Lee B.C., Lee J-O, Lee B.C., Lee J-O, Choi Y.K., Yoon J.-B., Korea Institute of Science and Technology(KIST), KR
In this works, we developed a top-down fabrication method to pattern and form carbon nanotube(CNT) interconnects with Cu encapsulation. Using this method, we fabricated spiral Cu-encapsulated CNT inductors for RF ICs and investigated the inductance [...]