Near-Field Nanomodification of Thin Films Using Femtosecond Laser and Atomic Force Microscope
Chimmalgi A., Choi T.Y., Grigoropoulos C.P., Wan D., Komvopoulos K., University of California-Berkeley, US
Nanostructures, which have characteristic dimensions that are difficult to achieve by conventional optical lithography techniques, are finding ever-increasing applications in a variety of fields. For applications incorporating nanodevices to gain widespread acceptance, high resolution, reliability [...]