MEMS-Based MHz Integrated Ultrasonic Nozzles with Applications to Micro/Nano Technologies
Tsai C.S., Tsai S.C., Song Y.L., Chou Y.F., Qiu G., Degiovanni E., Wang N., Cheng J.S., Tsai C.S., Tsai S.C., University of California Irvine, US
This paper reports on modeling/simulation and design, MEMS-based fabrication of MHz ultrasonic nozzles, and their applications to micro- and nano-technologies. The ultrasonic nozzle is made of a piezoelectric drive section and a silicon-resonator consisting of [...]