Chen Q. – Page 2 – TechConnect Briefs

Development of Self-Assembled Robust Microvalves with Electroform Fabricated Nano-Structured Nickel

Li B., Chen Q., University of Central Florida, US

The microvalve for the hydraulic actuatora need large flow rate (>10 cc/second, displacement related), high-pressure support ability (>10 MPa) and a high operational frequency (>10 kHz) [1, 2]. Microvalves can match the piezoelectric material’s frequency, [...]

Micromachined Nanocrystalline Silver Doped Tin Oxide Hydrogen Sulfide Sensor

Gong J., Chen Q., Lian M-R, Liu N-C, University of Central Florida, US

We report here an ultra high sensitive micromachined hydrogen sulfide gas sensor with nanocrystalline thin (100nm) silver doped SnO2 film. A polymeric sol-gel process has been successfully developed in fabricating the thin SnO2 nanofilm as [...]

Sol-Gel Prepared Single Wall Carbon Nanotube SnO2 Thin Film for Micromachined Gas Sensor

Gong J., Chen Q., Univeristy of Central Florida, US

We report here a novel micromachined single wall carbon nanotube (SWNT)/tin dioxide (SnO2) nano film gas sensor. A polymeric sol-gel process in combination with purified SWNT has been successfully developed in fabricating SWNT/SnO2 thin film [...]

Compact, Physics-Based Modeling of Nanoscale Limits of Double-Gate MOSFETs

Chen Q., Wang L., Murali R., Meindl J.D., Georgia Institute of Technology, US

Compact, physics-based models of subthreshold swing and threshold voltage are presented for double-gate (DG) MOSFETs in symmetric, asymmetric, and ground-plane modes. Applying these device models, threshold voltage variations in DG MOSFETs are comprehensively and exhaustively [...]

Strength Prediction for MEMS Components Transferring Large Loads

Chu L-H., Chen Q., Carman G.P., University of California, Los Angeles, US

In this paper the authors present a new strength criteria combined with a finite element analysis to predict the strength of MEMS fabricated microridges. The single crystal silicon microridges can be manufactured by various processes [...]