Chen H.J.H. – TechConnect Briefs

10GHz Surface Acoustic Wave Filter Fabrication by UV Nano-Imprint

Chen H.J.H., Chen N.H., Chen H.J.H., Chen N.H., Lin C.H., Huang F.S., National Tsing Hua University, TW

Surface acoustic wave (SAW) devices have been widely implemented for wireless communications. Recently, SAW devices continue the upward trend in frequency for higher functionality. Nanoimpirnt can adequately offer mass production technique on interdigital transducer (IDT) [...]

A Highly Reliable Pattern Transfer of Hydrogen Silsequioxane

Liu J.F., Chen H.J.H., Chen S.Z., Chen H.J.H., Chen S.Z., Huang F.S., National Tsing Hua University, TW

In this paper, we focus on the effects of process parameters on pattern embossing into HSQ films, and the pattern degradation of HSQ for room temperature aging effects. The dilution of HSQ affects not only [...]