Focussed ion beam etching of the interfacial region of lead zirconate titanate thin film after laser-release from sapphire fabrication substrate
Chakraborty S., Chakraborty T., Xu B., Harrington J., Chakraborty S., Chakraborty T., Zhang Q., Miles R.E., Milne S.J., University of Leeds, UK
Although many lead zirconate titanate (PZT) based MEMS have been demonstrated, the thermal incompatibility problems associated with in-situ fabrication of PZT films on the device substrate remain a major challenge. Process temperatures of 600 –700 [...]