The static behavior of RF MEMS capacitive switches in contact
Suy H.M.R., Herfst R.W., Steeneken P.G., Stulemeijer J., Bielen J.A., NXP Semiconductors Research, NL
A method is presented in which surface topography characterization is combined with the electrical measurement of the contact mechanics under electrostatic loading. Contact characteristics such as the surface separation versus the applied pressure, and the [...]