Analysis of Micromachined PZT Membranes for MEMS Power
Cho J-H., Anderson M.J., Richards C.D., Richards R.F., Bahr D.F., Richards C.D., Richards R.F., Washington State University, US
The need for miniaturized power sources for MEMS and microelectronics devices is widely recognized. Recent work by our team at Washington State University has been directed at the design of a micro heat engine in [...]