Low-power / High-temperature sensors and MEMS in SOI technology
Moreno-Hagelsieb L., Bulteel O., André N., Gerard P., Raskin J-P, Flandre D., Université catholique de Louvain / SENSOI, BE
Low-power and high-temperature sensors and MEMS designs based on bulk, SOI and IC compatible materials and processes. Target markets are in general public sensors for UV, ozone, CO, liquids presence, e.g. in mobile devices. In [...]