University of Liege – TechConnect Briefs

Perturbation Stochastic Finite Element Analysis of Thermoelastic Quality Factor of Micro-Resonators

Lepage S., Golinval J.-C., University of Liege, BE

MEMS are subject to inevitable and inherent uncertainty that leads to variability in their performance. The effects of these variations have to be considered and modeled to ensure required MEMS performance under uncertainties. In the [...]

Correlation of Experimental and Numerical Results on Electrostatically Actuated Micro-Beams

Rochus V., Rixen D.J., Golinval J.-C., University of Liege, BE

The aim of this paper is to validate numerical simulations of electromechanical coupling in micro-structures using some experimental results. The micro-structures studied here consist in a micro-bridge and two cantilever beams. Multi-physics simulations of micro-electro-mechanical [...]

Finite Element Modeling of Electro-Mechanical Coupling in Capacitive Micro-Systems

Rochus V., Rixen D.J., Golinval J.-C., University of Liege, BE

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid [...]