Samsung Electronics Co.Ltd. – TechConnect Briefs

Diameter controlled synthesis of carbon nanotubes by CVD using steric-stabilized iron nanoparticle catalysts

Mayya K.S., Lee S., Yeo I-S, Chung U-I, Moon J.T., Samsung Electronics Co.Ltd., KR

Carbon nanotubes (CNT) are the subject of intensive investigation due to their potential applications in nanoelectronics, biological sensors, high performance materials etc. CNTs can be synthesized using variety of techniques of which synthesis using chemical [...]

Uniform Nanoparticle based Monolayers Deposited by a Modified Spin Coating Technique

Subramanya Mayya K., Yeo I-S, Chung U-I, Moon J.T., Samsung Electronics Co.Ltd., KR

A method for deposition of uniform monolayers of cobalt nanoparticles (size ~ 10 nm) with uniformity in the nanoscale upto the macroscale is demonstrated on a 6" wafer by a modified spin coating method. The [...]

Modeling and Dynamic Simulation of Electrostatically Driven Micromirror

Kweon S., Lee H., Shin H., Samsung Electronics Co.Ltd., US

Dynamic behavior of the electrostatically driven bi-directional micromirror system was simulated with ANSYS parametric design language. The objective of the study is to construct a dynamic simulation scheme for the transient properties of electrostatically coupled [...]

Systematic Global Calibration of a Process Simulator

Lee J-H., Lee S-W., Kim K-D., Kim Y-W., Kong J-T., Lee J-H., Lee S-W., Kim K-D., Kim Y-W., Baek D-H., Samsung Electronics Co.Ltd., KR

This paper proposes a novel methodology of systematic global calibration of a process simulator and validates its accuracy and efficiency with application to memory and logic devices. With 175 SIMS profiles which cover the whole [...]