Korea Institute of Machinery & Materials(KIMM)

Sub-100nm and Large Area Pattern Process using by Hybrid Nanocontact Printing (HnCP)

Jo J., Kim K-Y, Choi D.S., Lee E-S, Korea Institute of Machinery & Materials(KIMM), KR

The hybrid nanocontact printing(HnCP) method is a technology for manufacturing an ultra violet(UV) imprinted silicon substrate from a master and then printing by letting it get in contact with a substrate coated with a metal [...]