US – Page 180 – TechConnect Briefs

Calibrating the AFM with Self-Calibratable MEMS: A Theoretical Study

Li F., Clark J.V., Purdue University, US

To perform reliable scientific measurements with the atomic force microscope (AFM), it is important to calibrate the AFM cantilever. Conventional calibration methods have a 10 to 15% uncertainty, and the accuracies of such methods are [...]

Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology

Qu P., Oakland University, US

As an exploratory study, this paper presents a fully differential single-axis accelerometer fabricated using MetalMUMPS process. The unique common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. [...]

Weak Magnetic Fields Sensing Using Soft Ferrite Nanoparticles and MEMS

Lyshevski S.E., Rochester Institute of Technology, US

We perform the feasibility analysis of sensing weak magnetic fields by using soft ferrite nanoparticles embedded in molecular complexes. The sensing mechanisms are based on the deflection of molecular complexes and induced strain due to [...]

Gravimeter on a Chip: A Theoretical Study

Li F., Clark J.V., Purdue University, US

We present a theoretical study of our proposed gravimeter on a chip. A gravimeter is a device used to measure gravity. In contrast to conventional gravimeters, our gravimeter is expected to be microscale, cheaper, more [...]

Control of MEMS-Technology Axial Topology MicroServos

Lyshevski S.E., Rochester Institute of Technology, US

Concurrent microsystems design, optimization, data-intensive analysis and hardware-software co-design of digital high-performance microelectromechanical systems (MEMS) have become major challenging themes. The major goal of this paper is to report-and-apply viable methodologies for design–and–implementation of MEMS [...]

Design and Fabrication of a Metallic MEMS Gripper Using Electro-Thermal V-Shape and Modified U-Shape Actuators

Khazaai J.J., Qu H., Shillor M., Smith L., Oakland University, US

This abstract reports on the design, fabrication, and characterization of a distinctive MEMS gripper electro-thermally driven by the new metallic (electroplated nickel) V-shape actuator (VSA) and the modified U-shape actuators (mUSA). The VSA and the [...]

Modularity in the Design and Volume Production of Microfluidic Devices

Podczerviensky J., Levine L., ALine, Inc., US

Robust fabrication of functional components in microfluidic devices will drive down their cost and improve their performance. We have developed a modular and readily customized approach for routine and volume production of complex microfluidic devices [...]

Lead Frame Package of MEMS Devices using Wafer-level, Air-gap Structures

Fritz N., Saha R., Bidstrup Allen S.A., Kohl P.A., Georgia Institute of Technology, US

This research looks at using a polymer Air-gap structures as a cost efficient method of wafer and chip level packaging MEMS devices for a wide range of applications. The presentation will describe how this style [...]

Design, Fabrication and Characterization of Inverse Adiabatic Fiber-To-Chip Couplers

Araghchini M., Khilo A., Holzwarth C.W., Dahlem M.S., Smith H.I., Ippen E.P., Kärtner F.X., Massachusetts Institute of Technology, US

In silicon photonics, light sources are typically located off-chip and connected to the chip with optical fibers. The problem of efficient coupling between the fiber and a submicron waveguide is challenging because the mode areas [...]

Design and Fabrication of a Multi-Axis MEMS Force Sensor with Integrated Carbon Nanotube Based Piezoresistors

Cullinan M.A., Panas R.M., Culpepper M.L., Massachusetts Institute of Technology, US

Nanonewton level, multi-axis force sensing is required for many biology, materials science and nanomanufacturing applications. Unfortunately, these requirements are difficult to achieve given the size, sensitivity and fabrication limitations associated with existing small-scale sensing techniques. [...]