UK – Page 36 – TechConnect Briefs

Comparison of Two Novel Control Strategies for a Closed Loop Micromachined Tunnelling Accelerometer

Gaura E., Kraft M., Coventry University, UK

This paper presents system level modelling and simulations results of two closed loop, force-feedback control strategies for micromachined tunnelling accelerometers. The first approach is based on the incorporation of the sensing element in a sigma-delta [...]

Closed-Loop, Neural Network Controlled Accelerometer Design

Gaura E.I., Ferreira N., Rider R.J., Steele N., Coventry University, UK

In this paper, a closed-loop, smart transducer design is proposed, based on artificial neural network (ANN) techniques. The design aims to improve the performance of open-loop, off-the-shelf capacitive acceleration sensors and increase their robustness to [...]

The Atomic Limit of Finite Elements in the Simulation of Micro-Resonators

Rudd R.E., University of Oxford, UK

We describe developments in the coupling of length scales methodology which allows the simulation of the dynamic and temperature dependent behavior of sub-micron Micro-Electro-Mechanical Systems (MEMS). This novel technique accurately models the behavior of the [...]

Squeezed Electrons in GaN Quantum Wells

Ridley B.K., Zakhleniuk N.A., Bennett C.R., University of Essex, UK

We present an analytic theory of hot-electron transport in a GaN quantum well containing a large-enough electron concentration for strong electron-electron scattering to establish a drifted distribution. Novel behaviour includes the squeezed electron distribution and [...]

3D Thermo-Electro-Mechanical Simulations of Gas Sensors Based on SOI Membranes

Lu C-C., Setiadi D., Udrea F., Milne W.I., Covington J.A., Gardner J.W., Cambridge University, UK

3D thermo-electro-mechanical device simulations are presented of a novel fully CMOS-compatible MOSFET gas sensor operating in a SOI membrane. A comprehensive stress analysis of a Si-SiO2ñbased multilayer membrane has been performed to ensure a high [...]

System Level Simulation of an Electrostatically Levitated Disk

Kraft M., Evans A., University of Southampton, UK

This paper describes the derivation of a system-level model for a micromachined disk which is levitated by electrostatic forces. Such a system has many potential applications for inertial sensors, micro-motors, microfluidic and micro-optical devices. As [...]

Simulation of Porous Si and SiOx Layer Growth

Burlakov V.M., Sutton A.P., Briggs G.A.D., Tsukahara Y., University of Oxford, UK

Monte Carlo simulation of deposition of amorphous SiOx layer on a polymer surface is reported. The model developed is based on the network properties of silica and takes into account dangling bonds arising during the [...]

Computer Simulation from Electron Beam Lithography to Optical Lithography

Cui Z., Rutherford Appleton Laboratory, UK

Simulation of electron beam lithography and optical lithography has been combined to investigate the influence of a distorted photomask feature on final photoresist image. Unlike the previous optical lithography simulation which was based on ideal [...]

A Neural Network Approach for the Identification of Micromachined Accelerometers

Gaura E.I., Steele N., Rider R.J., Coventry University, UK

The paper presents the identification procedure for a nonlinear accelerometer using a neural network. Simulation results obtained in SPICE and Matlab show good agreement between the behaviour of the sensor over its entire working range [...]

System Level Simulation of a Digital Accelerometer

Kraft M., Lewis C.P., Coventry University, UK

This paper describes the derivation of a detailed model of a micromachined accelerometer and its implementation in a commercial SPICE package. The sensing element is modeled at a system level, the control and interface electronics [...]