UA – Page 4 – TechConnect Briefs

A Program for Modeling of Technological Routes of VLSI Fabrication – ProMIC-T

Tesluk V., Korbetskyy O., Lvov Polytechnic, UA

A technological process of the VLSI fabrication constantly improves. In such conditions, new technology and constructive problems appear when making IC with submicron sizes. Decision for these problems is possible only by using CAD tools, [...]

Development of Periodical Spatial Distribution of Donor States in Heat-Treated Silicon

Selishchev P., Kyiv Tarasa Shevchenko University, UA

It is considered kinetics of oxygen thermo-donor states formation in silicon when atomically dissolved oxygen reacts to form a sequence of kinetically linked aggregates (complexes). One takes into account oxygen diffusion and elastic interaction between [...]