Nanoscale Modeling of Front-End Processing in Silicon


Spatially Resolved Electron Energy-Loss Spectroscopy, a Tool to Verify Electronic Structure Calculations in Nanostructured Materials

, , , , , , ,
Modern mcroscopy allows a direct comparison between experimental results and the atomic and electronic structure as obtained by state of the art ab-initio calculations. The phase reconstruction technique allows one to determine the positions of [...]

Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2002 International Conference on Computational Nanoscience and Nanotechnology
Published: April 22, 2002
Industry sector: Sensors, MEMS, Electronics
Topic: Informatics, Modeling & Simulation
ISBN: 0-9708275-6-3