Chapters:
- Plenary Lectures
- Micro and Nano Fluidic Systems
- System Level Modeling of MEMS
- Optimization, Co-Simulation
- MEMS Applications and Characterization
- Magnetic Device Modeling and Design
- Numerics
- Process Modeling
- Nanoscale Modeling of Front-End Processing in Silicon
- Quantum Effects, Quantum Devices and Spintronics
- Semiconductor Device Modeling
- Circuit Simulation
- Compact Modeling
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
ISBN: 0-9708275-7-1