Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Chapters:

  1. Plenary Lectures
  2. Bulk and Topography Processing
  3. Modeling
  4. Thermo-Mechanical Modeling
  5. Characterization, Parameter Extraction, Calibration
  6. Equivalent Circuits, Behavioral and Multilevel Simulation
  7. Discretization, Numerics, Computational Efficiency
  8. Software Systems and Tools
  9. Applications: Semiconductors
  10. Applications: Chemical Sensors
  11. Applications: Microfluidics
  12. Applications: Pressure, Actuation, Navigation
  13. Applications: Optics, Electromagnetics
  14. Applications: Hall Effect, Storage

Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
ISBN: 0-96661-35-0-3