Chapters:
- Plenary Lectures
- Bulk and Topography Processing
- Modeling
- Thermo-Mechanical Modeling
- Characterization, Parameter Extraction, Calibration
- Equivalent Circuits, Behavioral and Multilevel Simulation
- Discretization, Numerics, Computational Efficiency
- Software Systems and Tools
- Applications: Semiconductors
- Applications: Chemical Sensors
- Applications: Microfluidics
- Applications: Pressure, Actuation, Navigation
- Applications: Optics, Electromagnetics
- Applications: Hall Effect, Storage
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
ISBN: 0-96661-35-0-3