Chapters:
- Nano Fabrication
- Nanoparticles
- Nanostructured Materials and Devices
- Nanoscale Characterization
- MEMS and NEMS
- Wireless MEMS
- Sensors and Systems
- Nano Electronics and Photonics
Journal: TechConnect Briefs
Volume: 1, Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics
Published: May 3, 2009
ISBN: 978-1-4398-1782-7