Chen C-H, Larsen T., Schmid S., Liao H-S, Hwang I-S, Boisen A., Hwu E-T
Academia Sinica, TW
Keywords: characterization, MEMS, NEMS
We present a compact, simple and efficient platform for MEMS/NEMS characterization. In this platform, a DVD optical pickup unit (OPU) is combined with a CCD camera. A nano-scale resolution long range X-Y-Z linear stage below the sample is used for coarse adjustments. The DVD OPU is capable of detecting resonant frequencies of MEMS/NEMS structures. The working bandwidth and noise level of the OPU are 100 MHz and 1.3 pmHz^-1/2, respectively. Furthermore, the OPU has sub-micron laser spot size of 560 nm (FWHM), which facilitates optical measurements on sub-micrometer wide cantilevers. Both thermal noise and excited resonant frequencies of micrometer sized cantilevers/strings can be measured.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2013: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: May 12, 2013
Pages: 485 - 488
Industry sector: Advanced Materials & Manufacturing
Topics: Advanced Manufacturing, Nanoelectronics
ISBN: 978-1-4822-0584-8