Wächter C., Schreiber P., Karthe W., Elbers J-P, Glingener C., Voges E., Krabe D., Dümcke R., Reichl H., Hagner G., Schröter S., Bartelt H., Stock E.A., Bauer G., Schäfer W., Sickinger H., Schwider J.
Fraunhofer-Institut fur Angewandte Optikund Feinmechanik, DE
Keywords: design, MEMS, modeling, MOEMS, optical, system integration
Optical microsystems usually are of a hybrid nature. They consist of optical components. i.e.micro-optical and or integrated-optical ones, and additionally they include at least mechanical and packaging components. Therefore, a complete design process has to account for all relevant aspects – optical and thermomechanical simulation, packaging strategy, fabrication and test. This complexity requires a general design strategy. The approach presented is based on the coupling of the specification and the design. In a specification- environment the selection of appropriate solutions for given applications is enabled. It includes selection strategies for componebts, ist fabrication, packaging and test methods. The designenvironrnent is a simulation and modelling framework with software tools covering the whole design and optirnisation process, including the data-exchange with the specification environment. Test examples for our design strategy are different realisations of fibre optical switches.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 631 - 636
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Photonic Materials & Devices
ISBN: 0-96661-35-0-3