Milling Process Control with Dimensional Feedback on a Focused Ion Beam – Scanning Electron Microscope System (FIB-SEM)

Sanabia J.E.
Raith USA, Inc., US

Keywords: FIB, FIB-SEM, lithography, metrology, milling, nanofabrication, pattern, SEM

In nanofabrication and nanoanalysis, focused ion beam – scanning electron microscope (FIB-SEM) systems are increasingly used for demanding patterning tasks which rely on precise pattern placement and/or dimension control. Easily verifying and correcting for patterning accuracy during the FIB milling process in an automated fashion has previously not been possible. Here we present the use of a dedicated lithography platform on a commercially available FIB-SEM system for controlling the critical dimension during a FIB milling process. This has been achieved by controlling FIB-SEM system’s stage, the ion optics, and the electron optics through a single software interface.

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Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: June 18, 2012
Pages: 463 - 465
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topics: Advanced Manufacturing, Nanoelectronics
ISBN: 978-1-4665-6275-2