Krassow H., Zabala M., Götz A., Cané C.
Centro Nacional de Microelectronica, ES
Keywords: CMOS integrated pressure sensor, computational fluid dynamics, electrical network simulation, finite element simulation, micro-system optimization.
The FEM (Finite Element Method) package ANSYS includin`, the CFD (Computational Fluid Dynamics) module FLOTRAN was coupled with the electrical network simulator HSPICE for the comprehensive design of microsystems. The coupling permits the simultaneous optimization of geometrical, mechanical and electrical design parameters of a micro-electromechanical system. The usefulness of the coupling is demonstrated by the numerical simulation of a pressure-based water flow rate meter. The device fabricated comprises a flow restriction element with incorporated piezoresistive silicon pressure sensor with on-chip circuitry, which was automatically optimized towards the desired output signal using ANSYS design optimization tools.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 329 - 333
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3