A Fast Integral Equation Technique for Analysis of Microflow Sensors Based on Drag Force Calculations

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It is well known that MEMS based microfluidic devices operate in very low Reynolds number regime (Re < 1). Analysis and design of such microfluidic devices requires the solution of incompressible viscous fluid flow or incompressible Stokes equations. In this paper we present a new accelerated boundary-element method to rapidly solve the integral form of the Stokes equations. The computational complexity of the proposed approach is O(Nlog(N)), where N is the number of panels used to discretize the surface of the micromachined device.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 283 - 286
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3