Wang L., Prorok B.C.
Auburn University, US
Keywords: microstructure, thin film, Young's modulus
The Membrane Deflection Experiment (MDE) was employed to perform the microscale tensile testing on freestanding thin films of various FCC metals. Process parameter adjustments and annealing were performed to modulate the film microstructure. High-resolution SEM, including electron-backscattered diffraction (EBSD), was employed to provide a crystallographic analysis including grain orientation maps of the studied films. An analysis will be presented on the effects of microstructure on the mechanical properties of thin films
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: May 7, 2006
Pages: 760 - 763
Industry sector: Advanced Materials & Manufacturing
Topic: Materials Characterization & Imaging
ISBN: 0-9767985-6-5