Self-Welded Metal-Catalyzed Carbon Nanotube Piezoresistors with Very Large Longitudinal Piezoresistivity of ~ 4×10-8 Pa-1

Tabib-Azar M., Wang R., Xie Y.
Case Western Reserve University, US

Keywords: nano-sensors, NEMS, self-assembled scalable devices

Self-welded multi-walled carbon nanotube (MWCNT) bridges, grown using low-pressure metal-catalyzed chemical vapor deposition technique between silicon posts, were used as tiny piezoresistors to monitor vibration and bending/deformation of silicon cantilever beams for the first time. The weld strength of CNTs measured using atomic force microscope was larger than 100 nN/CNT and their full-scale resistance change was larger than 105 .The effective longitudinal piezoresistivity of these CNTs was larger than 4×10-8 Pa-1 which is more than 10 times larger than that of 44 in silicon.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: May 7, 2006
Pages: 117 - 120
Industry sector: Advanced Materials & Manufacturing
Topic: Carbon Nano Structures & Devices
ISBN: 0-9767985-6-5