Pham H-T, Wang D-A
National Chung Hsing University, TW
Keywords: bistable, microassembly, micromechanism
This paper proposes a novel method to switch a widely studied bistable micromechanism. Most researches utilize on-substrate thermomechanical actuators to actuate the fully compliant tensural bistable mechanisms, while others integrate comb-drive actuators to snap between the bistable mechanism’s stable equilibrium states. In this investigation, an external vibration is exploited to switch between the bistable states. There is no need to build any actuators on chip with this method. Simulations show a faster switching time than using thermal actuators and larger snapping distance between two stable equilibrium states constrained in the comb-drive case.
Journal: TechConnect Briefs
Volume: 3, Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation – Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: June 1, 2008
Pages: 639 - 642
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Informatics, Modeling & Simulation
ISBN: 978-1-4200-8505-1