Chung Y.B., Lim J.S., Kim H., Kim J.K., Hwang N.M., Kim H., Kim J.K., Park Y.J.
Seoul National University, KR
Keywords: HWCVD, microcrystalline silicon, photoconductivity, solar cell
High quality microcrystalline silicon thin film grown by Hot-Wire Chemical Vapor Deposition(HWCVD) and subsequently manufactured solar cells are presented. Intrinsic layer photoconductivity data is provided for one of the film quality measures, and the result is about 3 times higher than previously reported best record. We propose two-step microcrystalline silicon film growth mechanism, in which silicon nanoparticles are formed in the gas phase and subsequently incorporated into a solid film on glass substrates.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2009 Clean Technology Conference and Trade Show
Published: May 3, 2009
Pages: 33 - 35
Industry sector: Energy & Sustainability
Topic: Solar Technologies
ISBN: 978-1-4398-1787-2