Klocke V., Burkart I., Kaufmann R.
Klocke Nanotechnik GmbH, DE
Keywords: NanoFab, nanofabrication, nanomanipulation, nanorobotics, SEM/FIB workbench
With light microscopes it is natural for everybody to use manual or automatic toolsets like tweezers, knives, hooks, probes and several different measurement tools. The operators of SEM, FIB or Dual Beam systems generally work without toolsets and call it natural, although the wavelength limit of light is no physical boundary for using such tools. The SEM/FIB Workbench developed by Klocke Nanotechnik closes this gap and offers for the first time an easy to use system for in-situ Nanomanipulation, object handling, material preparation and processing, assembly and manufacturing including new methods for nano-characterization in SEM/FIB systems.
Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2011: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 13, 2011
Pages: 238 - 241
Industry sector: Advanced Materials & Manufacturing
Topics: Advanced Manufacturing, Nanoelectronics
ISBN: 978-1-4398-7139-3