There has been designed a matrix of four temperature sensors on a chip. Each temperature sensor is composed of 9 NMOS transistors for increasing temperature sensitivity. The matrix is designed for anemometric measurement of velocity and direction of air flow. Each pair measures the difference of temperatures given by flow velocity in specified direction. The resulting direction of flow is calculated from the data of perpendicular pair sensors using goniometric functions. The computation of angles is performed in digital part. WinSPICE and MATLAB have been used for design and simulation. There are described the principle of the selected method, design of two-dimensional configuration of measuring probe, designed and realised model of the sensor system. The CADENCE design framework is used for designing of integrated system including the evaluation circuits. The reached results are mentioned at the conclusion.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 8, 2005
Pages: 407 - 410
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Sensors - Chemical, Physical & Bio