Synthesis of ZnO Nanosheets by Exposing Zn Film to Oxygen Plasma at Low Temperatures


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We report that the well-defined ZnO nanosheets can be synthesized by directly exposing Zn film to oxygen plasma produced by PECVD method using N2O gas at temperatures below 350 oC. FESEM, XRD, TEM, and PL measurements were performed to characterize ZnO nanosheets. The analysis shows that the nanosheets have a wurtzite type hexagonal structure with lattice constants of a = 0.3250 nm and c = 0.5211 nm grown along the [10-10] direction. The growth mechanism for ZnO nanosheets will be presented.

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Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: June 18, 2012
Pages: 52 - 55
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topicss: Nanoelectronics, Photonic Materials & Devices
ISBN: 978-1-4665-6275-2