Study of Misaligned Lateral Combdrive Static Actuators

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In-plane combdrive misalignments are studied using developed analytical and numerical (FEA) models and techniques. Issues of decreasing precision and stability are discussed. The analytical models are closed form and can be used by designers of analog microdevices.

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Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Published: February 23, 2003
Pages: 570 - 573
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Informatics, Modeling & Simulation
ISBN: 0-9728422-1-7