Bochobza-Degani O., Elata D., Nemirovsky Y.
Electrical Engineering Department, Technion, IL
Keywords: charge pull-In, electrostatic actuation, modeling, numerical scheme
This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under voltage-control. Second, a novel numerical scheme for analyzing the stability and extracting the charge Pull-In parameters of charge-controlled actuators is proposed. Third, a novel strategy for further extending the travel-range of charge-controlled actuators is suggested.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Published: February 23, 2003
Pages: 308 - 311
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-0-9