Spectral engineering via complex patterns of rounded concave and convex nanoresonators achievable via integrated lithography realized by circularly polarized light

Sipos Á., Tóth E., Török A., Fekete O., Szabó G., Csete M.
University of Szeged, HU

Keywords: Babinet principle, interference lithography, plasmonic spectral engineering

Comparative study has been performed on the spectral and near-field properties of complex concave and convex nano-object patterns that can be fabricated via interferometric illumination of colloid sphere monolayers (IICSM) by applying circularly polarized light. Rectangular patterns of miniarrays composed of a central nanoring and satellite nanocrescents have been designed. Azimuthal orientation dependent spectral effects of the pattern period, composing nano-object shape and size parameters have been uncovered by re-illuminating the complementary patterns by linearly polarized light.

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Journal: TechConnect Briefs
Volume: TechConnect Briefs 2019
Published: June 17, 2019
Pages: 373 - 376
Industry sector: Sensors, MEMS, Electronics
Topics: Nanoelectronics, Sensors - Chemical, Physical & Bio
ISBN: 978-0-9988782-8-7