Simultaneous Tip and Base Growth of Carbon Nanotubes Produced by RF Plasma Enhanced CVD

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In this work, carbon nanotubes (CNTs) with curly and straight segments were synthesized by means of radio-frequency plasma enhanced chemical vapour deposition (rf-PECVD) onto silicon substrates, using Fe as the catalyst material. The origin of this peculiar combination of aligned and misaligned structures within a singular CNT has been discussed in terms of a simultaneous growth process from the tip and the base of the CNT and taking into account a catalyst interaction with the substrate and carbon diffusion through the growing film. Evidences for supporting such a growth mechanism were found by scanning and transmission electron microscopy studies. The growth kinetics is affected by the particular local conditions surrounding CNTs. A direct comparison between growth rate by PECVD and thermal CVD has been extracted from these samples in our experimental setup based on the proposed growth mechanism.

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Journal: TechConnect Briefs
Volume: 1, Nanotechnology 2008: Materials, Fabrication, Particles, and Characterization – Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: June 1, 2008
Pages: 148 - 151
Industry sector: Advanced Materials & Manufacturing
Topic: Carbon Nano Structures & Devices
ISBN: 978-1-4200-8503-7