Simulation and Modeling of a Micro Pressure Sensor Array

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In order to integrate MEM devices with CMOS circuits, compatibility of materials, micron scale mechanical structures, and the fabrication technology with CMOS is imperative. This paper describes the design of a micron scale pressure sensor array with multi-range and multi-function using ANSYS 5.7. The polysilicon sensor array rests atop multi-layer diaphragms. The specific configuration, the dynamic range, and the performance of individual sensors and the array as a whole are simulated. The resulting sensor array will be integrated with CMOS circuits.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 306 - 309
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-7-1