The constantly growing needs for solid-state temperature sensors motivates micromachined thermopile sensors [1-11]. We examine the Seebeck effect and discuss the the key physical parameters and characteristics. The micromachined microstructures are designed and fabricated. We examine miniaturized thermopile detectors.
Journal: TechConnect Briefs
Volume: 3, Biotech, Biomaterials and Biomedical: TechConnect Briefs 2017
Published: May 14, 2017
Pages: 199 - 202
Industry sector: Sensors, MEMS, Electronics
Topic: Sensors - Chemical, Physical & Bio