Varghese M., Rabinovich V.L., Senturia S.D.
Massachusetts Institute of Technology, US
Keywords: energy methods, macromodels, MEMS, modal-methods, stress-stiffening
We present a process for generating reduced-order models for stress-stiffened MEMS structures. The models are created using the established CHURN process, which uses non-linear, analytic, energy functions to describe the state of each conservative quasi-static energy domain (electrostatic, magnetostatic, elastostatic) in the MEMS structure. Equations of motion for the structure are constructed from the energy functions using Lagrangian mechanics. Our new contribution is the generation of an accurate analytic function that captures the non-linear elastic potential energy (strain energy) of the structure.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 493 - 496
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0