Polymeric Micropump with SU-8 Check Valves Assembled by Lamination Technique


Keywords: , , ,

This paper presents the first micropumps assembled using polymeric lamination technology. Each pump consists of two 100-m-thick, 10-mm-diameter SU-8 discs; two 1.5-mm-thick, 15-mm-diameter polymethylmethacrylate (PMMA) discs; and one piezo disc. The SU-8 parts were fabricated by a two-mask polymeric surface micromachining process. The PMMA parts were machined from a PMMA sheet by CO2-laser. The pump was assembled using adhesive bonding. The adhesive tapes were cut by the same laser system. With a drive voltage of 150 V the fabricated micropumps have been able to provide flow rates up to 2.9 ml/min and back pressures up to 1.6 m of water. The pump design and the polymeric technologies prove the feasibility of making more complex microfluidic systems based on the presented lamination approach.

PDF of paper:

Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Pages: 280 - 283
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 0-9728422-7-6