Novel ultra-fine hollow needles formed on Silicon membranes

, ,
,

Keywords: , , ,

In this paper we report the realization of record-small hollow needles. The fabrication process does not need a three-dimensional lithography and uses a high precision deep vertical etching in a hydrogenation assisted ion etching unit. The formation of hollow structures is possible using a small angle deposition method. The hollow structures have been employed to realize liquid-included capacitors where a considerable response to external inclinaiton is measured. The capillary force is an unwanted effect in such a structure where liquid-transfer through little holes is desired. By proper using of metal coating we have controlled this effect.

PDF of paper:


Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational
Published: June 21, 2010
Pages: 484 - 487
Industry sector: Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 978-1-4398-3402-2