Modeling and Simulation of Non-Linear Damage Growth During Ion Implants in Silicon

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In this work, we presents a newly proposed and enhanced damage model for the accurate prediction of both as-implanted impurity and point defect profiles in Monte Carlo simulation of ion implantation in (100) crystalline silicon. For the damage accumulation, we considered the self-annealing effects by introducing our proposed non-linear recombination probability function of each point defect for the computationally efficiency in fully simulated dynamic model. Our damage model shows very reasonable agreement with the experiments for the damage and the impurity profiles.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 359 - 362
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6