A physics-based broadband inductor model is presented that accurately captures geometry scaling, process statistics, and temperature dependence. The model utilizes an accurate and physical skin effect formulation, with substantial improvements over previous methods, along with an empirical proximity effect model to capture frequency dependent effects. The generalized model, in conjunction with a set of flexible layout parameterized-cells (pcell), has been integrated into IBM foundry design kits for a wide range of technologies with various back-end metallization options. The development of the model is presented in terms of its internal circuitry, physics-based calculations, and technology-dependent fitting parameters.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2007 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 20, 2007
Pages: 670 - 673
Industry sector: Sensors, MEMS, Electronics
Topics: Compact Modeling