We describe a method for estimating the Young’s modulus of thin-film gold deposited on the poly2 layer in the MUMPS process is described. An optical detection system employing position sensitive detectors (PSD) is built to measure the bimetallic (gold/poly2) cantilever deflection with increasing temperature. Measured cantiliver deflections are compared to finite element simulations performed with MEMCAD(TM) which show an excellent match for a Young’s modulus of 78 GPa and a Poisson’s ratio of 0.35.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 410 - 413
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems